Cressington 108 Auto/SE Sputter Coater

Name: Cressington 108 Auto/SE Sputter Coater
SKU: Cressington 108 Auto/SE
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Cressington 108 Auto/SE

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Specification

Chamber Size: 150mm OD x 165mm height (5.9 x 6.5")

Target: Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 28mm dia x 0.2mm thick

Sample Table: Holds 12 SEM pin mounts; Height adjustable through 60mm

Sputter Supply: Microprocessor based
Safety interlocked
Current control independent of vacuum
Digitally selectable current (10, 20, 30, or 40mA)

Sputter Head: Low-voltage novel magnetron design
Quick target change
Wrap-around dark-space shield

Analog Metering: Vacuum Atm - 0.001mb
Current, 0 - 50mA
Thickness Monitoring: Optional, MTM-10
Thickness Controller: Optional, MTM-20 with termination facility

Control Method: Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Digital timer (1-300 sec)

Desktop system: Vacuum pump has a compact design with low vibration operation All metal integrated coupling system

Requirements

Electrical: 100-120 or 200-240 VAC, 50/60Hz
(specify on order)

Power: 500VA (coater and pumping system #7010 together)

Argon gas: Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4")

Description product
Accessories

Description Cressington 108

108 Auto/SE Sputter Coater for applications where the coating thickness must have a very high degree of uniformity

The 108 Auto/SE Sputter Coater is the Special Equipment version of the 108 Auto Sputter Coater. The 108 Auto/SE is intended for use in applications where the coating thickness must have a very high degree of uniformity. Compared to the 108 Auto, the chamber size has been increased to 150mm outer diameter to accommodate the optional Rotary-Planetary-Tilting Stage or Rotary-Tilting Stage.

The 108 Auto/SE Sputter Coater can also be fitted with an optional MTM-10 or MTM-20 Thickness Measurement System.